JPH0347588B2 - - Google Patents

Info

Publication number
JPH0347588B2
JPH0347588B2 JP58220515A JP22051583A JPH0347588B2 JP H0347588 B2 JPH0347588 B2 JP H0347588B2 JP 58220515 A JP58220515 A JP 58220515A JP 22051583 A JP22051583 A JP 22051583A JP H0347588 B2 JPH0347588 B2 JP H0347588B2
Authority
JP
Japan
Prior art keywords
capacitor
electrode
oxide film
groove
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58220515A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60113460A (ja
Inventor
Akio Kita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58220515A priority Critical patent/JPS60113460A/ja
Publication of JPS60113460A publication Critical patent/JPS60113460A/ja
Publication of JPH0347588B2 publication Critical patent/JPH0347588B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP58220515A 1983-11-25 1983-11-25 ダイナミックメモリ素子の製造方法 Granted JPS60113460A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58220515A JPS60113460A (ja) 1983-11-25 1983-11-25 ダイナミックメモリ素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58220515A JPS60113460A (ja) 1983-11-25 1983-11-25 ダイナミックメモリ素子の製造方法

Publications (2)

Publication Number Publication Date
JPS60113460A JPS60113460A (ja) 1985-06-19
JPH0347588B2 true JPH0347588B2 (en]) 1991-07-19

Family

ID=16752224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58220515A Granted JPS60113460A (ja) 1983-11-25 1983-11-25 ダイナミックメモリ素子の製造方法

Country Status (1)

Country Link
JP (1) JPS60113460A (en])

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5214496A (en) * 1982-11-04 1993-05-25 Hitachi, Ltd. Semiconductor memory
JPH07123158B2 (ja) * 1984-03-26 1995-12-25 株式会社日立製作所 半導体装置の製造方法
JPH0815206B2 (ja) * 1986-01-30 1996-02-14 三菱電機株式会社 半導体記憶装置
US5182227A (en) * 1986-04-25 1993-01-26 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and method for manufacturing the same
US6028346A (en) * 1986-04-25 2000-02-22 Mitsubishi Denki Kabushiki Kaisha Isolated trench semiconductor device
JPH0810755B2 (ja) * 1986-10-22 1996-01-31 沖電気工業株式会社 半導体メモリの製造方法
KR100213189B1 (ko) * 1992-06-11 1999-08-02 김광호 반도체메모리장치 및 그 제조방법
JP4890769B2 (ja) * 2005-02-07 2012-03-07 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643171U (en]) * 1979-09-10 1981-04-20
JPS583260A (ja) * 1981-06-29 1983-01-10 Fujitsu Ltd 竪型埋め込みキヤパシタ
JPH065713B2 (ja) * 1982-06-07 1994-01-19 日本電気株式会社 半導体集積回路装置
JPH0666436B2 (ja) * 1983-04-15 1994-08-24 株式会社日立製作所 半導体集積回路装置

Also Published As

Publication number Publication date
JPS60113460A (ja) 1985-06-19

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